Design of Electrostatic RF Switch using COMSOL

Abstract

This paper presents the design, modeling, and measurements of radio frequency micro electromechanical systems (RF MEMS) switches. These models are rectangular, taper, and meandering beam structures. The characteristics of RF MEMS switches including displacement and natural frequency are studied. Rectangular, taper, and meandering structures are selected because these three structures display different geometrical shapes. Geometrical shapes are one of the important factors as far as the mechanical and electronic characteristics of RF MEMS are concerned. Switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch in wireless communication system, here there will be three different geometrical shapes to analyze their switch characteristic. In this paper COMSOL tool was used to carry out multiphysics coupling analysis and simulation.

Keywords: Micro electromechanical system (MEMS), radio frequency (RF), microwave, switches

Cite this Article: Huddar S, Hampannavar V, Patil P, et al. Design of Electrostatic RF Switch using COMSOL. Current Trends in Signal Processing. 2015; 5(1): 13–16p.